Thin- and thick-film structures for miniature biomedical sensors

Authors

M. R. Neuman, University of Memphis
E. Lindner, University of Memphis
A. Cristalli, University of Memphis
R. E. Gyurcsanyi, University of Memphis
K. Cheema, University of Memphis
M. Pandolf, University of Memphis

Abstract

Physical and chemical miniature biomedical sensors can be fabricated using thin-and thick-film technology. Devices such as biopotential electrodes; temperature, force, and compliant strain gauge sensors; and ion-selective electrodes have been designed, constructed, and applied to biomedical problems. Some times there are advantages to depositing non-conventional materials, thicker films, and thinthick-film hybrid structures in fabricating biomedical sensors.

Publication Title

1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings

Recommended Citation

Neuman, M., Lindner, E., Cristalli, A., Gyurcsanyi, R., Cheema, K., & Pandolf, M. (2000). Thin- and thick-film structures for miniature biomedical sensors. 1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings, 211-215. https://doi.org/10.1109/MMB.2000.893774