Thin- and thick-film structures for miniature biomedical sensors


Physical and chemical miniature biomedical sensors can be fabricated using thin-and thick-film technology. Devices such as biopotential electrodes; temperature, force, and compliant strain gauge sensors; and ion-selective electrodes have been designed, constructed, and applied to biomedical problems. Some times there are advantages to depositing non-conventional materials, thicker films, and thinthick-film hybrid structures in fabricating biomedical sensors.

Publication Title

1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings